ION IMPLANTATION - NEW SEMICONDUCTOR TECHNOLOGY

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作者：

KOSTKA, A

STRACK, H

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来源：

INTERNATIONALE ELEKTRONISCHE RUNDSCHAU | 1971年 / 25卷 / 10期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：246 / &

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