SPATIAL DISTRIBUTIONS OF IMPURITIES AND DEFECTS IN TE-DOPED AND SI-DOPED GAAS GROWN IN A REDUCED GRAVITY ENVIRONMENT

被引:4
作者
WANG, ZG
LI, CJ
WAN, SK
LIN, LY
机构
[1] Institute of Semiconductors, Academia Sinica, P.O. Box 912
基金
中国国家自然科学基金;
关键词
D O I
10.1016/0022-0248(90)90167-J
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The spatial distributions of impurities and structural defects of Te- and Si-doped GaAs grown in space have been investigated using capacitance-voltage (C-V) method and scanning photoluminescence (SPL) and cathodoluminescence image (CLI) techniques. The deep center profile and free carrier concentration profile both along the crystal growth direction and across the wafer are measured and discussed in terms of the impurity segregation and the reaction between shallow donors and Ga and As vacancies during the space crystal growth. Dislocation density and its features throughout the space grown crystals are reported. Fine impurity striations in parallel with the space crystal surface are observed and are believed to be related to the well-known Marangoni convection resulting from surface tension gradients. A tentative structural model for the identification of the 1.0 eV PL band is postulated on the basis of the new experimental data presented in this paper. © 1990.
引用
收藏
页码:38 / 45
页数:8
相关论文
共 11 条
[1]   PROPERTIES OF VACANCY DEFECTS IN GAAS SINGLE-CRYSTALS [J].
CHIANG, SY ;
PEARSON, GL .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (07) :2986-2991
[2]   FLOATING ZONE GROWTH OF SILICON UNDER MICROGRAVITY IN A SOUNDING ROCKET [J].
EYER, A ;
LEISTE, H ;
NITSCHE, R .
JOURNAL OF CRYSTAL GROWTH, 1985, 71 (01) :173-182
[3]   DOPANT TRACING OF TERRACE GROWTH IN GAAS LPE LAYERS [J].
FISCHER, B ;
BAUSER, E ;
SULLIVAN, PA ;
RODE, DL .
APPLIED PHYSICS LETTERS, 1978, 33 (01) :78-80
[4]   COHERENT MODEL FOR DEEP-LEVEL PHOTO-LUMINESCENCE OF CU-CONTAMINATED N-TYPE GAAS SINGLE-CRYSTALS [J].
GUISLAIN, HJ ;
DEWOLF, L ;
CLAUWS, P .
JOURNAL OF ELECTRONIC MATERIALS, 1978, 7 (01) :83-108
[5]  
HUANG LF, 1988, 1ST P CHIN S MICR SC, P280
[6]   OPTICAL PROPERTIES OF N-TYPE GAAS .2. FORMATION OF EFFICIENT HOLE TRAPS DURING ANNEALING IN TE-DOPED GAAS [J].
HWANG, CJ .
JOURNAL OF APPLIED PHYSICS, 1969, 40 (11) :4584-&
[7]   CONVECTIVE EFFECTS IN CRYSTALS GROWN FROM MELT [J].
PIMPUTKAR, SM ;
OSTRACH, S .
JOURNAL OF CRYSTAL GROWTH, 1981, 55 (03) :614-646
[8]   CRYSTAL-GROWTH METHOD UNDER MICROGRAVITY CONDITIONS [J].
RODOT, H ;
HAMIDI, M ;
BOURNEIX, J ;
OKHOTIN, AS ;
ZOUBRIDSKI, IA ;
KRIAPOV, VT ;
MARKOV, EV .
JOURNAL OF CRYSTAL GROWTH, 1981, 52 (APR) :478-484
[9]   ACCEPTOR ASSOCIATES AND BOUND EXCITONS IN GAAS-CU [J].
WANG, ZG ;
GISLASON, HP ;
MONEMAR, B .
JOURNAL OF APPLIED PHYSICS, 1985, 58 (01) :230-239
[10]  
WILLIAMS EW, 1968, PHYS REV, V168, P992