SCANNING ELECTROCHEMICAL MICROSCOPY - THE APPLICATION OF THE FEEDBACK MODE FOR HIGH-RESOLUTION COPPER ETCHING

被引：111
作者：
MANDLER, D
BARD, AJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 10期
关键词：
D O I：
10.1149/1.2096416
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：3143 / 3144
页数：2
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