SCANNING ELECTROCHEMICAL MICROSCOPY - THE APPLICATION OF THE FEEDBACK MODE FOR HIGH-RESOLUTION COPPER ETCHING

被引：109

作者：

MANDLER, D

BARD, AJ

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 10期

关键词：

D O I：

10.1149/1.2096416

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：3143 / 3144

页数：2

相关论文

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