INVESTIGATION OF PROCESS LATITUDE FOR QUALITY IMPROVEMENT IN X-RAY-LITHOGRAPHY MASK FABRICATION

被引：2

作者：

TRUBE, J

CHLEBEK, J

GRIMM, J

HUBER, HL

LOCHEL, B

STAUCH, H

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1990年 / 8卷 / 06期

关键词：

D O I：

10.1116/1.585123

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Statistical methods are applied to improve the quality of fabrication steps in x-ray mask production. A second-order central composite design was used to optimize the bonding procedure in the mask blank preparation. The computer-controlled bonding process delivers 4-in. mask blanks with a flatness in the range of 2-4-mu-m. Factorial design as an optimizing method was applied to improve the quality of gold absorber patterns. The dependence of surface roughness of pulse plated structures on switch-on time, duty cycle, and current was investigated. Using optimized parameters, an improvement of lateral homogeneity and a decrease of grain size was achieved.

引用

页码：1600 / 1603

页数：4