共 8 条
[1]
DIMOV G, 1977, SOV PRIBORI TECH EXP, V20, P29
[2]
EXPERIMENTAL SIMULATION OF A GASEOUS PLASMA COLLECTOR
[J].
PHYSICS OF FLUIDS B-PLASMA PHYSICS,
1990, 2 (04)
:837-841
[4]
HSU WL, 1981, THESIS PRINCETON U
[7]
MANOS DM, 1989, PLASMA ETCHING INTRO, P267