CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAMETHYLSILANE FILMS

被引：22
作者：
SZETO, R
HESS, DW
机构：
来源：
THIN SOLID FILMS | 1981年 / 78卷 / 02期
关键词：
D O I：
10.1016/0040-6090(81)90611-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：125 / 132
页数：8
相关论文
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