LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES

[21] SATCHELL DC, 1987, 1987 2 P I MECH ENG, P191

[22] DESIGN AND CALIBRATION OF A MICROFABRICATED FLOATING-ELEMENT SHEAR-STRESS SENSOR [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 750 - 757

[23] SCHMIDT MA, 1986, JUN IEEE SOL STAT SE, P94

[24] SCHMIDT MA, 1988, THESIS MIT CAMBRIDGE

[25] SMITS JG, 1985, 3RD P INT C SOL STAT, P93

[26] WAHL AM, 1945, MECHANICAL SPRINGS

[27] SUPERSAP

[21] SATCHELL DC, 1987, 1987 2 P I MECH ENG, P191

[22] DESIGN AND CALIBRATION OF A MICROFABRICATED FLOATING-ELEMENT SHEAR-STRESS SENSOR [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (06) : 750 - 757

[23] SCHMIDT MA, 1986, JUN IEEE SOL STAT SE, P94

[24] SCHMIDT MA, 1988, THESIS MIT CAMBRIDGE

[25] SMITS JG, 1985, 3RD P INT C SOL STAT, P93

[26] WAHL AM, 1945, MECHANICAL SPRINGS

[27] SUPERSAP