LATERALLY DRIVEN POLYSILICON RESONANT MICROSTRUCTURES

被引：565

作者：

TANG, WC ^{[1
]}

NGUYEN, TCH ^{[1
]}

HOWE, RT ^{[1
]}

机构：

[1] UNIV CALIF BERKELEY, ELECTR RES LAB, BERKELEY, CA 94720 USA

来源：

SENSORS AND ACTUATORS | 1989年 / 20卷 / 1-2期

关键词：

D O I：

10.1016/0250-6874(89)87098-2

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：25 / 32

页数：8

共 27 条

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