TRIPLE SLIT SCHEME FOR HIGH-CURRENT VARIABLE-SHAPED BEAM FORMING

被引：4

作者：

IDESAWA, M

GOTO, E

SOMA, T

SASAKI, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570270

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1672 / 1675

页数：4

共 11 条

[1]

COGSWELL G, 1978, 8TH P INT C EL ION B, P117

[2]

CREWE AV, 1978, OPTIK, V52, P337

[3] DESIGN OF A VARIABLE-APERTURE PROJECTION AND SCANNING SYSTEM FOR ELECTRON-BEAM [J].

GOTO, E ;

SOMA, T ;

IDESAWA, M .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :883-886

[4]

GOTO E, 1978, 8 P INT C EL ION BEA, P135

[5] VARIABLE SPOT SHAPING FOR ELECTRON-BEAM LITHOGRAPHY [J].

PFEIFFER, HC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :887-890

[6]

PFEIFFER HC, 1978, 8TH P S EL ION BEAM, P149

[7]

PFEIFFER HC, 1971, 11TH P S EL ION LAS, P239

[8]

SASAKI T, 1979, P VLSI C PASADENA, P125

[9] DOUBLE-APERTURE METHOD OF PRODUCING VARIABLY SHAPED WRITING SPOTS FOR ELECTRON LITHOGRAPHY [J].

THOMSON, MGR ;

COLLIER, RJ ;

HERRIOTT, DR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :891-895

[10] DYNAMIC BEAM SHAPING [J].

TROTEL, J .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :872-873

← 1 2 →