CHARACTERIZATION AND THERMAL-DESORPTION SPECTROSCOPY STUDY ON A NEW, LOW OUTGASSING MATERIAL SURFACE FOR IMPROVED ULTRAHIGH-VACUUM USES

被引：22
作者：
FUJITA, D
HOMMA, T
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期
关键词：
D O I：
10.1116/1.574986
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：230 / 234
页数：5
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[15]  
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