CHARACTERIZATION AND THERMAL-DESORPTION SPECTROSCOPY STUDY ON A NEW, LOW OUTGASSING MATERIAL SURFACE FOR IMPROVED ULTRAHIGH-VACUUM USES

被引：22
作者：
FUJITA, D
HOMMA, T
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1988年 / 6卷 / 02期
关键词：
D O I：
10.1116/1.574986
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：230 / 234
页数：5
相关论文
共 15 条
[1]   ANALYSIS OF THERMAL DESORPTION MASS-SPECTRA .1. [J].
CHAN, CM ;
ARIS, R ;
WEINBERG, WH .
APPLIED SURFACE SCIENCE, 1978, 1 (03) :360-376
[2]   ANALYSIS OF THERMAL DESORPTION MASS-SPECTRA .2. [J].
CHAN, CM ;
WEINBERG, WH .
APPLIED SURFACE SCIENCE, 1978, 1 (03) :377-387
[3]   THE INITIAL OXIDATION OF IRON AT 200-DEGREE-C AND 300-DEGREES-C AND THE EFFECT OF SURFACE SULFUR [J].
DRISCOLL, TJ .
OXIDATION OF METALS, 1981, 16 (1-2) :107-131
[4]  
FUJITA D, 1986, THESIS U TOKYO
[5]   NORMAL MODES IN HEXAGONAL BORON NITRIDE [J].
GEICK, R ;
PERRY, CH ;
RUPPRECH.G .
PHYSICAL REVIEW, 1966, 146 (02) :543-&
[6]   LOW-ENERGY AUGER TRANSITIONS OF BORON IN SEVERAL BORON-COMPOUNDS [J].
HANKE, G ;
MULLER, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02) :964-968
[7]   TITANIUM NITRIDE FILM AS A PROTECTIVE COATING FOR A VACUUM DEPOSITION CHAMBER [J].
KOMIYA, S ;
UMEZU, N ;
HAYASHI, C .
THIN SOLID FILMS, 1979, 63 (02) :341-346
[8]  
LIST H, 1974, GMELIN HDB ANORGANIS, V13
[9]  
MESSER G, 1977, 7TH P INT VAC C 3RD, P223
[10]   TECHNOLOGY OF LOW-PRESSURE SYSTEMS - ESTABLISHMENT OF OPTIMUM CONDITIONS TO OBTAIN LOW DEGASSING RATES ON 316-L STAINLESS-STEEL BY HEAT-TREATMENTS [J].
NUVOLONE, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1977, 14 (05) :1210-1212
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