PREPARATION AND PROPERTIES OF SILICON NITRIDE PRODUCED BY A RADIO FREQUENCY GLOW DISCHARGE REACTION OF SILANE AND NITROGEN - PREPARATION AND PROPERTIES OF SILICON NITRIDE

被引：22

作者：

KUWANO, Y

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1968年 / 7卷 / 01期

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D O I：

10.1143/JJAP.7.88

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：88 / &

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