共 50 条
[21]
INSTABILITY MECHANISM IN HELICON-WAVE PROPAGATION IN LAYERED STRUCTURES
[J].
PHYSICAL REVIEW B,
1986, 33 (02)
:1257-1264
[23]
Main parameters of a slot line for helicon-wave excitation
[J].
Russian Physics Journal,
2011, 53
:1125-1130
[24]
Preparation of aluminium-doped ZnO films by helicon-wave excited plasma sputtering
[J].
BLUE LASER AND LIGHT EMITTING DIODES II,
1998,
:48-51
[25]
Oxynitridation of silicon using helicon-wave excited and inductively-coupled nitrogen plasma
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS,
1997, 36 (02)
:805-812
[26]
Oxidation of GaAs using helicon-wave excited nitrogen-oxygen-argon plasma
[J].
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS,
1998, 37 (4B)
:L427-L430