FOCUSED-ION-BEAM FUSE CUTTING FOR REDUNDANCY TECHNOLOGY

被引：5
|
作者：
KOMANO, H
OHMURA, Y
TAKIGAWA, T
机构：
[1] Toshiba Corp, Kawasaki, Jpn, Toshiba Corp, Kawasaki, Jpn
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1988年 / 35卷 / 07期
关键词：
D O I：
10.1109/16.3342
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
13
引用
收藏
页码：899 / 903
页数：5
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