FLUORINE DOPING OF IN2O3 FILMS EMPLOYING ION-PLATING TECHNIQUES

被引：30
作者：
AVARITSIOTIS, JN [1 ]
HOWSON, RP [1 ]
机构：
[1] LOUGHBOROUGH UNIV TECHNOL,DEPT PHYS,THIN FILM UNIT,LOUGHBOROUGH LE11 3TU,LEICESTERSHIRE,ENGLAND
来源：
THIN SOLID FILMS | 1981年 / 80卷 / 1-3期
关键词：
D O I：
10.1016/0040-6090(81)90207-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：63 / 66
页数：4
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