ELECTROMECHANICAL DEFLECTIONS OF PIEZOELECTRIC TUBES WITH QUARTERED ELECTRODES

被引：98

作者：

CHEN, CJ

机构：

[1] IBM Thomas J. Watson Research Center, Yorktown Heights, NY 10598

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 01期

关键词：

D O I：

10.1063/1.107348

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The deflection of a piezoelectric tube, with the outer (or inner) metal coating sectioned into four quadrants, is analyzed. We show that by applying a voltage V on one of the quadrants, the electromechanical deflection is ( square-root 2d31VL2/pi-Dh), where d31 is the piezoelectric coefficient, L is the length, D the diameter, and h the wall thickness of the tube. The deflections calculated with it agree well with the results of finite-element calculations and direct experimental measurements. The formula can be used in the design and application of tube scanners in scanning tunneling microscopes and scanning force microscopes.

引用

页码：132 / 134

页数：3

共 7 条

[1]

[Anonymous], 1986, THEORY ELASTICITY, DOI [DOI 10.1016/C2009-0-25521-8, 10.1016/C2009-0-25521-8]

[2] SINGLE-TUBE 3-DIMENSIONAL SCANNER FOR SCANNING TUNNELING MICROSCOPY [J].