X-RAY GENERATION FROM 50-MJ, 120-PS KRF LASER-PRODUCED PLASMAS

被引：6
作者：
BROUGHTON, JN
FEDOSEJEVS, R
机构：
[1] Department of Electrical Engineering, University of Alberta, Edmonton
来源：
JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 03期
关键词：
D O I：
10.1063/1.351281
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The generation of x rays from the interaction of low-energy (10-50 mJ) 120-ps KrF laser pulses with solid targets has been experimentally investigated. Conversion efficiency as a function of laser energy and detailed keV x-ray spectra have been obtained for targets (Fe, Ni, and Cu) with potential application in high-resolution x-ray lithography. Peak x-ray conversion efficiencies of over 3% in the 800-1400-eV photon energy band have been measured for laser intensities of 1.5 x 10(14) W/cm2. In addition, transmission grating spectra have been obtained to characterize the overall distribution of x-ray emission at photon energies down to 100 eV.
引用
收藏
页码：1153 / 1162
页数：10
相关论文
共 25 条
  • [21] Petzold H.-C., 1989, Microelectronic Engineering, V10, P41, DOI 10.1016/0167-9317(89)90140-8
  • [22] MEASUREMENT OF KRF-LASER PLASMA X-RAY-RADIATION FROM TARGETS WITH VARIOUS ATOMIC NUMBERS
    POPIL, R
    GUPTA, PD
    FEDOSEJEVS, R
    OFFENBERGER, AA
    [J]. PHYSICAL REVIEW A, 1987, 35 (09): : 3874 - 3882
  • [23] SIMPLE GENERATION OF HIGH-POWER, PICOSECOND, TUNABLE EXCIMER LASER-PULSES
    SZATMARI, S
    SCHAFER, FP
    [J]. OPTICS COMMUNICATIONS, 1983, 48 (04) : 279 - 283
  • [24] VEIGELE WJ, CRC HDB SPECTROSCOPY, P28
  • [25] HIGH REPETITIVE PLASMA X-RAY SOURCE PRODUCED BY A ZIGZAG SLAB LASER
    ZENG, GM
    TAKAHASHI, M
    DAIDO, H
    KANABE, T
    ARITOME, H
    NAKATSUKA, M
    NAKAI, S
    [J]. JOURNAL OF APPLIED PHYSICS, 1990, 67 (08) : 3597 - 3603
123