X-RAY GENERATION FROM 50-MJ, 120-PS KRF LASER-PRODUCED PLASMAS

被引：6

作者：

BROUGHTON, JN

FEDOSEJEVS, R

机构：

[1] Department of Electrical Engineering, University of Alberta, Edmonton

来源：

JOURNAL OF APPLIED PHYSICS | 1992年 / 71卷 / 03期

关键词：

D O I：

10.1063/1.351281

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The generation of x rays from the interaction of low-energy (10-50 mJ) 120-ps KrF laser pulses with solid targets has been experimentally investigated. Conversion efficiency as a function of laser energy and detailed keV x-ray spectra have been obtained for targets (Fe, Ni, and Cu) with potential application in high-resolution x-ray lithography. Peak x-ray conversion efficiencies of over 3% in the 800-1400-eV photon energy band have been measured for laser intensities of 1.5 x 10(14) W/cm2. In addition, transmission grating spectra have been obtained to characterize the overall distribution of x-ray emission at photon energies down to 100 eV.

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收藏

页码：1153 / 1162

页数：10

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