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- [1] PROXIMITY EFFECT IN ELECTRON-BEAM LITHOGRAPHYJOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1271 - 1275CHANG, THP
- [2] PATTERN PARTITIONING FOR ENHANCED PROXIMITY-EFFECT CORRECTIONS IN ELECTRON-BEAM LITHOGRAPHYIBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 530 - 536PARIKH, MSCHREIBER, DE
- [3] PROXIMITY EFFECT CORRECTION IN ELECTRON-BEAM LITHOGRAPHYOPTICAL ENGINEERING, 1993, 32 (10) : 2446 - 2451OWEN, G
- [4] PROXIMITY EFFECT CORRECTION IN ELECTRON-BEAM LITHOGRAPHYFUJITSU SCIENTIFIC & TECHNICAL JOURNAL, 1980, 16 (03): : 99 - 113MACHIDA, YNAKAYAMA, NHISATSUGU, T
- [5] PROXIMITY EFFECT CORRECTION IN ELECTRON-BEAM LITHOGRAPHYJOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (03) : C158 - C158WITTELS, NDYOUNGMAN, CI
- [6] PROXIMITY EFFECT CORRECTION IN ELECTRON-BEAM LITHOGRAPHYJOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04): : 1279 - 1285KATO, TWATAKABE, YNAKATA, H
- [7] CORRECTIONS TO PROXIMITY EFFECTS IN ELECTRON-BEAM LITHOGRAPHY .3. EXPERIMENTSJOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 4383 - 4387PARIKH, M
- [8] CORRECTIONS TO PROXIMITY EFFECTS IN ELECTRON-BEAM LITHOGRAPHY .1. THEORYJOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 4371 - 4377PARIKH, M
- [9] CORRECTIONS TO PROXIMITY EFFECTS IN ELECTRON-BEAM LITHOGRAPHY .2. IMPLEMENTATIONJOURNAL OF APPLIED PHYSICS, 1979, 50 (06) : 4378 - 4382PARIKH, M