SIMPLE NEGATIVE-ION SPUTTER SOURCE

被引：0
作者：
CASKEY, GT [1 ]
DOUGLAS, RA [1 ]
RICHARDS, HT [1 ]
SMITH, HV [1 ]
机构：
[1] UNIV WISCONSIN,MADISON,WI 53706
来源：
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1978年 / 23卷 / 04期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：541 / 542
页数：2
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