Formation of Copper Seed Layers and Copper Via Filling with Various Additives

被引:2
作者
Lee, Hyunju [1 ]
Ji, Changwook [1 ]
Woo, Sungmin [2 ]
Choi, Manho [2 ]
Hwang, Yoon-Hwae [3 ,4 ]
Lee, Jae-Ho [5 ]
Kim, Yangdo [1 ]
机构
[1] Pusan Natl Univ, Sch Mat Sci & Engn, Busan 609735, South Korea
[2] Pusan Natl Univ, Educ Program Samsung Adv Integrated Circuit, Busan 609735, South Korea
[3] Pusan Natl Univ, Dept Nanomat Engn, Miryang 627706, South Korea
[4] Pusan Natl Univ, BK Nano Fus Technol Div 21, Miryang 627706, South Korea
[5] Hongik Univ, Dept Mat Sci & Engn, Seoul 121791, South Korea
来源
KOREAN JOURNAL OF MATERIALS RESEARCH | 2012年 / 22卷 / 07期
关键词
Cu via filling; desmear treatment; additives; bottom-up super filling;
D O I
10.3740/MRSK.2012.22.7.335
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Recently, the demand for the miniaturization of printed circuit boards has been increasing, as electronic devices have been sharply downsized. Conventional multi-layered PCBs are limited in terms their use with higher packaging densities. Therefore, a build-up process has been adopted as a new multi-layered PCB manufacturing process. In this process, via-holes are used to connect each conductive layer. After the connection of the interlayers created by electro copper plating, the viaholes are filled with a conductive paste. In this study, a desmear treatment, electroless plating and electroplating were carried out to investigate the optimum processing conditions for Cu via filling on a PCB. The desmear treatment involved swelling, etching, reduction, and an acid dip. A seed layer was formed on the via surface by electroless Cu plating. For Cu via filling, the electroplating of Cu from an acid sulfate bath containing typical additives such as PEG(polyethylene glycol), chloride ions, bis-(3-sodiumsulfopropyl disulfide) (SPS), and Janus Green B(JGB) was carried out. The desmear treatment clearly removes laser drilling residue and improves the surface roughness, which is necessary to ensure good adhesion of the Cu. A homogeneous and thick Cu seed layer was deposited on the samples after the desmear treatment. The 2,2'-Dipyridyl additive significantly improves the seed layer quality. SPS, PEG, and JGB additives are necessary to ensure defect-free bottom-up super filling.
引用
收藏
页码:335 / 341
页数:7
相关论文
共 10 条
[1]  
Kobayashi T., Kawasaki J., Mihara K., Honma H., Electrochim. Acta, 47, (2001)
[2]  
Takahashi K., Terao H., Tomita Y., Yamaji Y., Hoshino M., Sato T., Morifuji T., Sunohara M., Bonkohara M., Jpn. J. Appl. Phys., 40, (2001)
[3]  
Andricacos P.C., Uzoh C., Dukovic J.O., Horkans J., Deligianni H., IBM J. Res. Dev., 42, (1998)
[4]  
Cobley A.J., Edgar L., Goosey M., Kellner R., Mason T.J., Circuit World, 37, (2011)
[5]  
Lau P.P., Wong C.C., Chan L., Appl. Surf. Sci., 253, (2006)
[6]  
Josell D., Baker B., Witt C., Wheeler D., Moffat T.P., J. Electrochem. Soc., 149, 12, (2002)
[7]  
Park M.S., Cho J.C., Kim S.H., Shin D.J., Jung H.M., Lee C.K., Cho M.-S., Lee Y., Int. J. Adhes. Adhes., 31, (2011)
[8]  
Seah C.H., Mridha S., Chan L.H., J. Mater. Process. Tech., 114, (2001)
[9]  
Dow W.-P., Li C.-C., Su Y.-C., Shen S.-P., Huang C.-C., Lee C., Hsu B., Hsu S., Electrochim. Acta, 54, (2009)
[10]  
Miura S., Honma H., Surf. Coating. Tech., 169-170, (2003)