EFFECTS OF AMBIENT GAS ON PHOTOACOUSTIC DISPLACEMENT MEASUREMENT BY LASER INTERFEROMETRIC PROBE

被引：2

作者：

SUMIE, S ^{[1
]}

TAKAMATSU, H ^{[1
]}

NISHIMOTO, Y ^{[1
]}

KAWATA, Y ^{[1
]}

HORIUCHI, T ^{[1
]}

NAKAYAMA, H ^{[1
]}

KANATA, T ^{[1
]}

NISHINO, T ^{[1
]}

机构：

[1] KOBE UNIV,DEPT ELECT & ELECTR ENGN,NADA KU,KOBE 657,JAPAN

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 74卷 / 11期

关键词：

D O I：

10.1063/1.355113

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The effect of gas adjacent to the sample surface on the photo-acoustic displacement (PAD) measurement was studied by using an extremely sensitive laser interferometric probe with a sensitivity of 0.1 picometers. For silicon, the PAD signal measured at atmospheric pressure increased about 18% as compared to the signal obtained in vacuum, and varied by less than 0.7% for a change in pressure of 5% around 1 atm. It is shown, by a simple theoretical model, that the variation of the PAD is caused by a change in refractive index of the gas and the real PAD can be accurately obtained by correcting this effect.

引用

页码：6530 / 6533

页数：4

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