ELLIPSOMETRY AND CLEAN SURFACES OF SILICON AND GERMANIUM

被引:75
作者
MEYER, F
DEKLUIZE.EE
BOOTSMA, GA
机构
关键词
D O I
10.1016/0039-6028(71)90163-4
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:88 / +
页数:1
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