ELECTRON-ENERGY DISTRIBUTIONS IN OXYGEN MICROWAVE PLASMAS

被引：28

作者：

HEIDENREICH, JE ^{[1
]}

PARASZCZAK, JR ^{[1
]}

MOISAN, M ^{[1
]}

SAUVE, G ^{[1
]}

机构：

[1] UNIV MONTREAL,DEPT PHYS,MONTREAL H3C 3J7,QUEBEC,CANADA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 01期

关键词：

D O I：

10.1116/1.583980

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：288 / 292

页数：5

共 17 条

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[8] ELECTROSTATIC-PROBE ANALYSIS OF MICROWAVE PLASMAS USED FOR POLYMER ETCHING [J].

HEIDENREICH, JE ;

PARASZCZAK, JR ;

MOISAN, M ;

SAUVE, G .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (01) :347-354

[9] ANALYSIS OF ELECTRON SWARM EXPERIMENTS IN OXYGEN [J].

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[10]

Pang S. W., 1986, Microelectronic Engineering, V5, P351, DOI 10.1016/0167-9317(86)90064-X

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