SPRAYED FILMS OF INDIUM TIN OXIDE AND FLUORINE-DOPED TIN OXIDE OF LARGE SURFACE-AREA

被引：109

作者：

POMMIER, R

GRIL, C

MARUCCHI, J

机构：

[1] Groupe d' Etudes des Matériaux, Composants et Systèmes, Centre d'Etudes d'Electronique des Solides, associé au Centre National de la Recherche Scientifique, Université des Sciences et Techniques du Languedoc, 34060 Montpellier Cédex France

来源：

THIN SOLID FILMS | 1981年 / 77卷 / 1-3期

关键词：

FILMS - Electric Conductivity - Glass - Tin oxides;

D O I：

10.1016/0040-6090(81)90363-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

An attempt is made to optimize the transmission and resistivity of thin films 10 cm plus 10 cm in area. The design of the system used is such that it is possible to control all the parameters affecting the formation of these layers. The nozzle moves about the substrate which is heated to a high temperature. The solution is pulverized by means of a neutral gas (e. g. nitrogen) so that it arrives at the substrate in the form of very fine drops. The layer thickness is monitored by observing the interference orders in the thin films.

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页码：91 / 97

页数：7

相关论文

共 16 条

[1] CHEMICAL SPRAY DEPOSITION PROCESS FOR INORGANIC FILMS [J].

CHAMBERLIN, RR ;

SKARMAN, JS .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1966, 113 (01) :86-+

[2] HIGHLY CONDUCTIVE, TRANSPARENT FILMS OF SPUTTERED IN2-XSNXO3-Y [J].

FRASER, DB ;

COOK, HD .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1972, 119 (10) :1368-&

[3]

GROTH R, 1968, PHILIPS TECH REV, V29, P17

[4] NEW FIGURE OF MERIT FOR TRANSPARENT CONDUCTORS [J].

HAACKE, G .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (09) :4086-4089

[5]

JARZEBSKI ZM, 1976, J ELECTROCHEM SOC, V123, pC199, DOI [10.1149/1.2133010, 10.1149/1.2132647, 10.1149/1.2133090]

[6] CHEMICAL VAPOR-DEPOSITION OF TRANSPARENT ELECTRICALLY CONDUCTING LAYERS OF INDIUM OXIDE DOPED WITH TIN [J].

KANE, J ;

SCHWEIZER, HP ;

KERN, W .

THIN SOLID FILMS, 1975, 29 (01) :155-163

[7] OPTICAL AND ELECTRICAL PROPERTIES OF DOPED IN2O3 FILMS [J].

KOSTLIN, H ;

JOST, R ;

LEMS, W .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1975, 29 (01) :87-93

[8] OPTICAL AND ELECTRICAL-PROPERTIES OF SNO2 THIN-FILMS IN RELATION TO THEIR STOICHIOMETRIC DEVIATION AND THEIR CRYSTALLINE-STRUCTURE [J].

MANIFACIER, JC ;

DEMURCIA, M ;

FILLARD, JP ;

VICARIO, E .

THIN SOLID FILMS, 1977, 41 (02) :127-135

[9] IN2O3-(SN) AND SNO2-(F) FILMS - APPLICATION TO SOLAR-ENERGY CONVERSION .2. ELECTRICAL AND OPTICAL-PROPERTIES [J].

MANIFACIER, JC ;

SZEPESSY, L ;

BRESSE, JF ;

PEROTIN, M ;

STUCK, R .

MATERIALS RESEARCH BULLETIN, 1979, 14 (02) :163-175

[10] SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM [J].

MANIFACIER, JC ;

GASIOT, J ;

FILLARD, JP .

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11) :1002-1004