VARIABLE SPOT SHAPE CONTROL ELECTRONICS

被引：4

作者：

WOODARD, OC

HO, CT

MICHAIL, MS

MUIR, AW

WILLIAMS, MC

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 06期

关键词：

D O I：

10.1116/1.570294

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1783 / 1786

页数：4

共 6 条

[1]

DAVIS DE, 1977, IBM J RES DEV, V21, P498, DOI 10.1147/rd.216.0498

[2] AUTOMATIC STABILIZATION OF AN ELECTRON-PROBE FORMING SYSTEM [J].

DORAN, S ;

PERKINS, M ;

STICKEL, W .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06) :1174-1176

[3] VARIABLE SPOT SHAPING FOR ELECTRON-BEAM LITHOGRAPHY [J].

PFEIFFER, HC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (03) :887-890

[4]

STICKEL W, 1979, 8TH P INT C EL ION B

[5] VARIABLE SPOT-SHAPED E-BEAM LITHOGRAPHIC TOOL [J].

WEBER, EV ;

MOORE, RD .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1780-1782

[6]

Yourke H. S., 1976, International Electron Devices Meeting. (Technical digest), P431