ELECTROPHYSICAL CHARACTERISTICS OF SILICON-CARBIDE FILMS ON SILICON

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作者：

VLASKINA, SI

KRASIKOVA, AV

SIDYAKIN, VG

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INORGANIC MATERIALS | 1989年 / 25卷 / 09期

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T [工业技术];

学科分类号：

08 ;

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页码：1326 / 1328

页数：3

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