LONG-PULSE EXCIMER INTEGRATED MASTER-OSCILLATOR POWER-AMPLIFIER OPTICAL CAVITY

被引:4
|
作者
MCKEE, TJ
机构
[1] Lumonics Inc., Kanata, ON, K2K 1Y3
关键词
D O I
10.1364/OL.15.000795
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The performance of an integrated master-oscillator–power-amplifier optical cavity to extract polarized, line-narrowed, tunable, and near-diffraction-limited radiation efficiently from a long-pulse wide-aperture electric discharge XeCl excimer laser is described. Pulse energies of 600 mJ with signal purity exceeding 95% have been achieved from a single laser. © 1990 Optical Society of America.
引用
收藏
页码:795 / 797
页数:3
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