PROFILE MEASUREMENT USING PROJECTION OF RUNNING FRINGES

被引：81
作者：
INDEBETOUW, G [1 ]
机构：
[1] UNIV BERN,INST APPL PHYS,CH-3001 BERN,SWITZERLAND
来源：
APPLIED OPTICS | 1978年 / 17卷 / 18期
关键词：
D O I：
10.1364/AO.17.002930
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
A method of profile control or measurement using projected fringes is presented. The fringes are dynamically translated over the object, and the phase of the signal picked up at a selected point on the surface is used to determine the depth or the depth error of the profile at this point. The method has the advantage of being contact-free, fast, accurate, and easily automated. © 1978 Optical Society of America.
引用
收藏
页码：2930 / 2933
页数：4
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