SEGREGATION AND INCREASED DOPANT SOLUBILITY IN PT-IMPLANTED AND LASER-ANNEALED SI LAYERS

被引：45

作者：

CULLIS, AG ^{[1
]}

WEBBER, HC ^{[1
]}

POATE, JM ^{[1
]}

SIMONS, AL ^{[1
]}

机构：

[1] BELL TEL LABS INC,MURRAY HILL,NJ 07974

来源：

关键词：

D O I：

10.1063/1.91478

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：320 / 322

页数：3

共 15 条

[1] SEGREGATION EFFECTS IN CU-IMPLANTED SI AFTER LASER-PULSE MELTING
BAERI, P
CAMPISANO, SU
FOTI, G
RIMINI, E
[J]. PHYSICAL REVIEW LETTERS, 1978, 41 (18) : 1246 - 1249
[2] CONSTITUTIONAL SUPERCOOLING DURING CRYSTAL GROWTH FROM STIRRED MELTS .3. THE MORPHOLOGY OF THE GERMANIUM CELLULAR STRUCTURE
BARDSLEY, W
BOULTON, JS
HURLE, DTJ
[J]. SOLID-STATE ELECTRONICS, 1962, 5 (NOV-D) : 395 - &
[3] SPATIALLY CONTROLLED CRYSTAL REGROWTH OF ION-IMPLANTED SILICON BY LASER IRRADIATION
CELLER, GK
POATE, JM
KIMERLING, LC
[J]. APPLIED PHYSICS LETTERS, 1978, 32 (08) : 464 - 466
[4] CREWDSON RC, 1966, THESIS CALIFORNIA I
[5] DEVICE FOR LASER-BEAM DIFFUSION AND HOMOGENIZATION
CULLIS, AG
WEBBER, HC
BAILEY, P
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1979, 12 (08): : 688 - 689
[6] CULLIS AG, UNPUBLISHED
[7] CULLIS AG, 1979, LASER SOLID INTERACT, P311
[8] STRUCTURE AND PROPERTIES OF GLASSY METALS
DUWEZ, P
[J]. ANNUAL REVIEW OF MATERIALS SCIENCE, 1976, 6 : 83 - 117
[9] JACKSON KA, 1979, LASER SOLID INTERACT, P102
[10] KHAIBULLIN IB, 1977, SOV PHYS SEMICOND+, V11, P190