EFFECTS OF BEAM PARAMETERS ON EXCIMER LASER DEPOSITION OF YBA2CU3O7-DELTA

被引：124
作者：
MUENCHAUSEN, RE
HUBBARD, KM
FOLTYN, S
ESTLER, RC
NOGAR, NS
JENKINS, C
机构：
[1] US MIL ACAD,W POINT,NY 10997
[2] FT LEWIS COLL,DEPT CHEM,DURANGO,CO 81301
[3] UNIV CALIF LOS ALAMOS SCI LAB,DIV MAT SCI & TECHNOL,LOS ALAMOS,NM 87545
[4] UNIV CALIF LOS ALAMOS SCI LAB,DIV CHEM & LASER SCI,LOS ALAMOS,NM 87545
来源：
APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 06期
关键词：
D O I：
10.1063/1.103303
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O 7-δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos3.5(θ) spread and composition varied with angle; in the perpendicular direction, more diffuse [cos1.5(θ)] plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface.
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页码：578 / 580
页数：3
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