EFFECTS OF BEAM PARAMETERS ON EXCIMER LASER DEPOSITION OF YBA2CU3O7-DELTA

被引：124

作者：

MUENCHAUSEN, RE

HUBBARD, KM

FOLTYN, S

ESTLER, RC

NOGAR, NS

JENKINS, C

机构：

[1] US MIL ACAD,W POINT,NY 10997

[2] FT LEWIS COLL,DEPT CHEM,DURANGO,CO 81301

[3] UNIV CALIF LOS ALAMOS SCI LAB,DIV MAT SCI & TECHNOL,LOS ALAMOS,NM 87545

[4] UNIV CALIF LOS ALAMOS SCI LAB,DIV CHEM & LASER SCI,LOS ALAMOS,NM 87545

来源：

APPLIED PHYSICS LETTERS | 1990年 / 56卷 / 06期

关键词：

D O I：

10.1063/1.103303

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Broad angular distributions have been observed for XeCl laser ablation plumes used in the deposition of YBa2Cu3O 7-δ thin films. Distributions (inferred from film thickness) and film stoichiometry were measured as a function of laser fluence, beam shape, and oxygen pressure. Parallel to the long axis of the laser spot, plumes exhibited a cos3.5(θ) spread and composition varied with angle; in the perpendicular direction, more diffuse [cos1.5(θ)] plume distributions were associated with stoichiometric deposition. The observed phenomena are consistent with formation of a Knudsen layer near the target surface.

引用

页码：578 / 580

页数：3

共 21 条

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