DEPTH RESOLUTION IN COMPOSITION PROFILES BY ION SPUTTERING AND SURFACE-ANALYSIS FOR SINGLE-LAYER AND MULTILAYER STRUCTURES ON REAL SUBSTRATES

被引：75
作者：
SEAH, MP
LEA, C
机构：
来源：
THIN SOLID FILMS | 1981年 / 81卷 / 03期
关键词：
D O I：
10.1016/0040-6090(81)90488-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：257 / 270
页数：14
相关论文
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