DEVELOPMENT OF FAST AND FINE POSITION CONTROL-SYSTEM OF AN ULTRASONIC MOTOR

被引：1

作者：

AOYAGI, S ^{[1
]}

ODA, T ^{[1
]}

KAMIYA, Y ^{[1
]}

OKABE, S ^{[1
]}

机构：

[1] OKI ELECT IND CO LTD,HACHIOJI,TOKYO 193,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷

关键词：

ULTRASONIC MOTOR; FINE POSITIONING; FAST POSITIONING; PHASE SHIFT; LINEARIZATION; FEEDBACK CONTROL SYSTEM; INTEGRAL CONTROL ACTION;

D O I：

10.7567/JJAPS.31S1.254

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

This paper shows experimentally that an ultrasonic motor has an approximate first-order transfer function between phase shift input and rotational speed output. A position control system which feedbacks position and velocity involving integral control action was developed. A fast response of about 100 msec and fairly high positioning accuracy up to a rotary encoder resolution were both realized in this system.

引用

页码：254 / 256

页数：3

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