CONDUCTING LUMINESCENT ZNS FILMS FORMED BY PLASMA-ASSISTED METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION

被引：8
|
作者：
PATEL, NG
FISCHER, AG
机构：
来源：
THIN SOLID FILMS | 1988年 / 162卷 / 1-2期
关键词：
D O I：
10.1016/0040-6090(88)90214-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：263 / 271
页数：9
相关论文
共 50 条
  • [41] A NEW METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION PROCESS FOR SELECTIVE COPPER METALLIZATION
    NORMAN, JAT
    MURATORE, BA
    DYER, PN
    ROBERTS, DA
    HOCHBERG, AK
    DUBOIS, LH
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 17 (1-3): : 87 - 92
  • [42] GROWTH-KINETICS DURING METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION OF ZNTE
    DUMONT, H
    MARBEUF, A
    BOUREE, JE
    GOROCHOV, O
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1993, 17 (1-3): : 41 - 46
  • [43] GRAZING-INCIDENCE REFLECTANCE OF SIC FILMS PRODUCED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION
    KESKIKUHA, RAM
    OSANTOWSKI, JF
    TOFT, AR
    PARTLOW, WD
    APPLIED OPTICS, 1988, 27 (08): : 1499 - 1502
  • [44] PRESSURE SENSOR USING POLYCRYSTALLINE GERMANIUM FILMS PREPARED BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION
    KAMIMURA, K
    KIMURA, N
    ONUMA, Y
    SENSORS AND ACTUATORS A-PHYSICAL, 1990, 23 (1-3) : 958 - 960
  • [45] THE EFFECT OF ARGON DURING THE PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION OF TIN
    HILTON, MR
    SALMERON, M
    SOMORJAI, GA
    THIN SOLID FILMS, 1988, 167 (1-2) : L31 - L34
  • [46] THE PREPARATION OF THIN-FILMS FOR PHOTOVOLTAIC CONVERSION BY NOVEL METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION TECHNIQUES
    SAUNDERS, A
    VECHT, A
    SOLAR CELLS, 1987, 21 : 455 - 455
  • [47] AC-THIN FILM ZNS-MN ELECTROLUMINESCENT DEVICE PREPARED BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION
    HIRABAYASHI, K
    KOGURE, O
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1985, 24 (11): : 1484 - 1487
  • [48] Remote plasma-assisted metal organic chemical vapor deposition of tantalum nitride thin films with different radicals
    Cho, KN
    Han, CH
    Noh, KB
    Oh, JE
    Paek, SH
    Park, CS
    Lee, SI
    Lee, MY
    Lee, JG
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12A): : 6502 - 6505
  • [49] THIN-FILMS FORMED BY PLASMA ENHANCED CHEMICAL VAPOR-DEPOSITION
    ILLIC, DB
    HEWLETT-PACKARD JOURNAL, 1982, 33 (08): : 24 - 27
  • [50] SEMICONDUCTING ZINC-OXIDE FILMS PREPARED BY METAL ORGANIC-CHEMICAL VAPOR-DEPOSITION FROM DIETHYL ZINC
    ROTH, AP
    WILLIAMS, DF
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (12) : 2684 - 2686
12345