A PIEZOELECTRIC MICROPUMP BASED ON MICROMACHINING OF SILICON

被引：454

作者：

VANLINTEL, HTG

VANDEPOL, FCM

BOUWSTRA, S

机构：

[1] UNIV TWENTE,TRANSDUCERS & MAT SCI GRP,POB 217,7500 AE ENSCHEDE,NETHERLANDS

[2] CTR MICROELECTR TWENTE,7500 AM ENSCHEDE,NETHERLANDS

[3] UNIV TWENTE,SENSORS & ACTUATORS RES GRP,7500 AE ENSCHEDE,NETHERLANDS

来源：

SENSORS AND ACTUATORS | 1988年 / 15卷 / 02期

关键词：

All Open Access; Green;

D O I：

10.1016/0250-6874(88)87005-7

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

PIEZOELECTRIC DEVICES

引用

页码：153 / 167

页数：15

共 9 条

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BOUWSTRA S, 1986, 3RD P SENS ACT S NET, P199

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[3]

MULDER JCM, 1984, THESIS U TWENTE NETH

[4] SILICON AS A MECHANICAL MATERIAL [J].

PETERSEN, KE .

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[5]

SMITS JG, 1985, Patent No. 8302860

[6]

TIMOSHENKO S, 1950, THEORY PLATES SHELLS, P364

[7]

Timoshenko S. P., 1950, THEORY PLATES SHELLS, P51

[8] FIELD ASSISTED GLASS-METAL SEALING [J].

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POMERANT.DI .

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[9] YOUNGS MODULUS SHEAR MODULUS AND POISSONS RATIO IN SILICON AND GERMANIUM [J].

WORTMAN, JJ ;

EVANS, RA .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (01) :153-+

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