ORIENTATION OF RAPID THERMALLY ANNEALED LEAD-ZIRCONATE-TITANATE THIN-FILMS ON (111) PT SUBSTRATES

被引:288
作者
BROOKS, KG
REANEY, IM
KLISSURSKA, R
HUANG, Y
BURSILL, L
SETTER, N
机构
[1] Departement de Materiaux Laboratoire de Ceramique, Ecole Polytechnique Fédérate de Lausanne, Lausanne
关键词
D O I
10.1557/JMR.1994.2540
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The nucleation, growth, and orientation of lead zirconate titanate thin films prepared from organometallic precursor solutions by spin coating on (111) oriented platinum substrates and crystallized by rapid thermal annealing was investigated. The effects of pyrolysis temperature, post-pyrolysis thermal treatments, and excess lead addition are reported. The use of post-pyrolysis oxygen anneals at temperatures in the regime of 350-450 degrees C was found to strongly affect the kinetics of subsequent amorphous-pyrochlore-perovskite crystallization by rapid thermal annealing. The use of such post-pyrolysis anneals allowed films of reproducible microstructure and textures [both (100) and (111)] to be prepared by rapid thermal annealing. It is proposed that such anneals and pyrolysis temperature affect the oxygen concentration/average Pb valence in the amorphous films prior to annealing. Such changes in the Pb valence state then affect the stability of the transient pyrochlore phase and thus the kinetics of perovskite crystallization.
引用
收藏
页码:2540 / 2553
页数:14
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