ORIENTATION OF RAPID THERMALLY ANNEALED LEAD-ZIRCONATE-TITANATE THIN-FILMS ON (111) PT SUBSTRATES

被引:288
作者
BROOKS, KG
REANEY, IM
KLISSURSKA, R
HUANG, Y
BURSILL, L
SETTER, N
机构
[1] Departement de Materiaux Laboratoire de Ceramique, Ecole Polytechnique Fédérate de Lausanne, Lausanne
关键词
D O I
10.1557/JMR.1994.2540
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The nucleation, growth, and orientation of lead zirconate titanate thin films prepared from organometallic precursor solutions by spin coating on (111) oriented platinum substrates and crystallized by rapid thermal annealing was investigated. The effects of pyrolysis temperature, post-pyrolysis thermal treatments, and excess lead addition are reported. The use of post-pyrolysis oxygen anneals at temperatures in the regime of 350-450 degrees C was found to strongly affect the kinetics of subsequent amorphous-pyrochlore-perovskite crystallization by rapid thermal annealing. The use of such post-pyrolysis anneals allowed films of reproducible microstructure and textures [both (100) and (111)] to be prepared by rapid thermal annealing. It is proposed that such anneals and pyrolysis temperature affect the oxygen concentration/average Pb valence in the amorphous films prior to annealing. Such changes in the Pb valence state then affect the stability of the transient pyrochlore phase and thus the kinetics of perovskite crystallization.
引用
收藏
页码:2540 / 2553
页数:14
相关论文
共 50 条
[31]   EXAMINATION OF BARRIER LAYERS FOR LEAD ZIRCONATE TITANATE THIN-FILMS [J].
MADSEN, LD ;
WEAVER, L .
JOURNAL OF ELECTRONIC MATERIALS, 1992, 21 (01) :93-97
[32]   PYROCHLORE TO PEROVSKITE PHASE-TRANSFORMATION IN SOL-GEL DERIVED LEAD-ZIRCONATE-TITANATE THIN-FILMS [J].
KWOK, CK ;
DESU, SB .
APPLIED PHYSICS LETTERS, 1992, 60 (12) :1430-1432
[33]   INFLUENCE OF LASER FLUENCE ON STRUCTURAL AND FERROELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY LASER ABLATION [J].
KIDOH, H ;
OGAWA, T ;
YASHIMA, H ;
MORIMOTO, A ;
SHIMIZU, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2167-2169
[34]   RAPID THERMAL ANNEALING OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN-FILMS [J].
CHEN, J ;
UDAYAKUMAR, KR ;
BROOKS, KG ;
CROSS, LE .
JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) :4465-4469
[35]   Reduction of etching damage in lead-zirconate-titanate thin films with inductively coupled plasma [J].
Lim, KT ;
Kim, KT ;
Kim, DP ;
Kim, CI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2003, 21 (04) :1563-1567
[36]   INTERFACIAL MECHANISMS CONTROLLING PHASE-FORMATION IN SOL-GEL DERIVED LEAD-ZIRCONATE-TITANATE THIN-FILMS [J].
MAJUMDER, SB ;
KULKARNI, VN ;
MOHAPATRA, YN ;
AGRAWAL, DC .
BULLETIN OF MATERIALS SCIENCE, 1994, 17 (06) :1005-1014
[37]   Cathodic electrodeposition of mixed oxide/hydroxide precursor for lead-zirconate-titanate thin films [J].
Prodromides, AE ;
Schmuki, P .
FERROELECTRICS, 1999, 225 (1-4) :1117-+
[38]   EFFECTS OF OPERATING-CONDITIONS ON THE FAST-DECAY COMPONENT OF THE RETAINED POLARIZATION IN LEAD-ZIRCONATE-TITANATE THIN-FILMS [J].
BENEDETTO, JM ;
MOORE, RA ;
MCLEAN, FB .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (01) :460-466
[39]   Pulsed excimer laser deposition and characterization of ferroelectric lead-zirconate-titanate thin films [J].
陈逸清 ;
郑立荣 ;
张顺开 ;
林成鲁 ;
邹世昌 .
ChineseScienceBulletin, 1995, (04) :340-344
[40]   STRUCTURAL AND ELECTRICAL-PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY MULTITARGET REACTIVE DC MAGNETRON COSPUTTERING [J].
KIM, KY ;
KIM, ST ;
CHOO, WK .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (04) :1700-1707