ORIENTATION OF RAPID THERMALLY ANNEALED LEAD-ZIRCONATE-TITANATE THIN-FILMS ON (111) PT SUBSTRATES

被引:288
作者
BROOKS, KG
REANEY, IM
KLISSURSKA, R
HUANG, Y
BURSILL, L
SETTER, N
机构
[1] Departement de Materiaux Laboratoire de Ceramique, Ecole Polytechnique Fédérate de Lausanne, Lausanne
关键词
D O I
10.1557/JMR.1994.2540
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The nucleation, growth, and orientation of lead zirconate titanate thin films prepared from organometallic precursor solutions by spin coating on (111) oriented platinum substrates and crystallized by rapid thermal annealing was investigated. The effects of pyrolysis temperature, post-pyrolysis thermal treatments, and excess lead addition are reported. The use of post-pyrolysis oxygen anneals at temperatures in the regime of 350-450 degrees C was found to strongly affect the kinetics of subsequent amorphous-pyrochlore-perovskite crystallization by rapid thermal annealing. The use of such post-pyrolysis anneals allowed films of reproducible microstructure and textures [both (100) and (111)] to be prepared by rapid thermal annealing. It is proposed that such anneals and pyrolysis temperature affect the oxygen concentration/average Pb valence in the amorphous films prior to annealing. Such changes in the Pb valence state then affect the stability of the transient pyrochlore phase and thus the kinetics of perovskite crystallization.
引用
收藏
页码:2540 / 2553
页数:14
相关论文
共 50 条
[21]   LIGHT-SCATTERING FROM SOL-GEL PROCESSED LEAD-ZIRCONATE-TITANATE THIN-FILMS [J].
SINCLAIR, MB ;
DIMOS, D ;
POTTER, BG ;
SCHWARTZ, RW .
INTEGRATED FERROELECTRICS, 1995, 7 (1-4) :225-236
[22]   CRYSTALLIZATION OF SOL-GEL DERIVED LEAD-ZIRCONATE-TITANATE THIN-FILMS IN ARGON AND OXYGEN ATMOSPHERES [J].
BURSILL, LA ;
BROOKS, KG .
JOURNAL OF APPLIED PHYSICS, 1994, 75 (09) :4501-4509
[23]   RAMAN-SCATTERING STUDY OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED ON SILICON SUBSTRATES BY RADIO-FREQUENCY MAGNETRON SPUTTERING [J].
TAGUCHI, I ;
PIGNOLET, A ;
WANG, L ;
PROCTOR, M ;
LEVY, F ;
SCHMID, PE .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (11) :6625-6631
[24]   INFLUENCE OF RAPID THERMAL ANNEALING ON STRUCTURAL AND INTERFACIAL PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS PREPARED BY EXCIMER-LASER DEPOSITION [J].
ZHENG, LR ;
CHEN, YQ ;
LIN, CL ;
ZOU, SC .
CHINESE PHYSICS LETTERS, 1994, 11 (08) :518-521
[25]   Microstructural characterization of sol-gel lead-zirconate-titanate thin films [J].
Impey, SA ;
Huang, Z ;
Patel, A ;
Beanland, R ;
Shorrocks, NM ;
Watton, R ;
Whatmore, RW .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (04) :2202-2208
[26]   Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures [J].
T.J. Zhu ;
L. Lu ;
M.O. Lai .
Applied Physics A, 2005, 81 :701-714
[27]   Pulsed laser deposition of lead-zirconate-titanate thin films and multilayered heterostructures [J].
Zhu, TJ ;
Lu, L ;
Lai, MO .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 81 (04) :701-714
[28]   Printed Lead-Zirconate-Titanate Thin Films for Hard Disk Drive Applications [J].
Xu, Weiwei ;
Cao, G. Z. ;
Shen, I. Y. .
2018 ASIA-PACIFIC MAGNETIC RECORDING CONFERENCE (APMRC), 2018,
[29]   EXCIMER LASER ABLATED LEAD ZIRCONATE TITANATE THIN-FILMS [J].
ROY, D ;
KRUPANIDHI, SB ;
DOUGHERTY, JP .
JOURNAL OF APPLIED PHYSICS, 1991, 69 (11) :7930-7932
[30]   PREPARATION AND PROPERTIES OF LEAD ZIRCONATE-TITANATE THIN-FILMS [J].
IIJIMA, K ;
UEDA, I ;
KUGIMIYA, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2149-2151