ORIENTATION OF RAPID THERMALLY ANNEALED LEAD-ZIRCONATE-TITANATE THIN-FILMS ON (111) PT SUBSTRATES

被引:287
作者
BROOKS, KG
REANEY, IM
KLISSURSKA, R
HUANG, Y
BURSILL, L
SETTER, N
机构
[1] Departement de Materiaux Laboratoire de Ceramique, Ecole Polytechnique Fédérate de Lausanne, Lausanne
关键词
D O I
10.1557/JMR.1994.2540
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The nucleation, growth, and orientation of lead zirconate titanate thin films prepared from organometallic precursor solutions by spin coating on (111) oriented platinum substrates and crystallized by rapid thermal annealing was investigated. The effects of pyrolysis temperature, post-pyrolysis thermal treatments, and excess lead addition are reported. The use of post-pyrolysis oxygen anneals at temperatures in the regime of 350-450 degrees C was found to strongly affect the kinetics of subsequent amorphous-pyrochlore-perovskite crystallization by rapid thermal annealing. The use of such post-pyrolysis anneals allowed films of reproducible microstructure and textures [both (100) and (111)] to be prepared by rapid thermal annealing. It is proposed that such anneals and pyrolysis temperature affect the oxygen concentration/average Pb valence in the amorphous films prior to annealing. Such changes in the Pb valence state then affect the stability of the transient pyrochlore phase and thus the kinetics of perovskite crystallization.
引用
收藏
页码:2540 / 2553
页数:14
相关论文
共 50 条
  • [11] EFFECT OF POLING ON PIEZOELECTRIC PROPERTIES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS FORMED BY SPUTTERING
    WATANABE, S
    FUJIU, T
    FUJII, T
    APPLIED PHYSICS LETTERS, 1995, 66 (12) : 1481 - 1483
  • [12] ANGULARLY AND SPECTRALLY RESOLVED LIGHT-SCATTERING FROM LEAD-ZIRCONATE-TITANATE THIN-FILMS
    SINCLAIR, MB
    DIMOS, D
    POTTER, BG
    SCHWARTZ, RW
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1995, 78 (08) : 2027 - 2032
  • [13] HYDROTHERMAL SYNTHESES OF LEAD-ZIRCONATE-TITANATE THIN-FILMS FABRICATED A CONTINUOUS-SUPPLY AUTOCLAVE
    OHBA, Y
    MIYAUCHI, M
    SAKAI, E
    DAIMON, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (9B): : 5216 - 5219
  • [14] PULSED EXCIMER-LASER DEPOSITION AND CHARACTERIZATION OF FERROELECTRIC LEAD-ZIRCONATE-TITANATE THIN-FILMS
    CHEN, YQ
    ZHENG, LR
    ZHANG, SK
    LIN, CG
    ZOU, SC
    CHINESE SCIENCE BULLETIN, 1995, 40 (04): : 340 - 344
  • [15] ELECTRICAL AND RELIABILITY CHARACTERISTICS OF LEAD-ZIRCONATE-TITANATE (PZT) FERROELECTRIC THIN-FILMS FOR DRAM APPLICATIONS
    CARRANO, J
    SUDHAMA, C
    LEE, J
    TASCH, A
    MILLER, W
    1989 INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 1989, : 255 - 258
  • [16] Lead zirconate titanate thin films on GaAs substrates
    Arscott, S
    Kurchania, R
    Miles, RE
    Milne, SJ
    JOURNAL OF MATERIALS SCIENCE, 1997, 32 (23) : 6129 - 6133
  • [17] Lead zirconate titanate thin films on GaAs substrates
    S Arscott
    R Kurchania
    R. E Miles
    S. J Milne
    Journal of Materials Science, 1997, 32 : 6129 - 6133
  • [18] Characterization of sputtered lead-zirconate-titanate thin films with various compositions
    Sakoda, T
    Aoki, K
    Fukuda, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (6A): : 3600 - 3603
  • [19] Characterization of sputtered lead-zirconate-titanate thin films with various compositions
    Sakoda, Tomoyuki
    Aoki, Katsuhiro
    Fukuda, Yukio
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (6 A): : 3600 - 3603
  • [20] FATIGUE MODELING OF LEAD ZIRCONATE TITANATE THIN-FILMS
    YOO, IK
    DESU, SB
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 13 (04): : 319 - 322