MEASUREMENT OF GATED FIELD EMITTER FAILURES

被引：3

作者：

GILMORE, M ^{[1
]}

MCGRUER, NE ^{[1
]}

BROWNING, J ^{[1
]}

BINTZ, WJ ^{[1
]}

机构：

[1] NORTHEASTERN UNIV,DEPT ELECT & COMP ENGN,BOSTON,MA 02146

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1993年 / 64卷 / 02期

关键词：

D O I：

10.1063/1.1144181

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The emerging field of vacuum microelectronics has many promising applications including flat-panel displays, microwave devices, and ionization sources. The technology is based on arrays of microfabricated micrometer-scaled gated field emitters. Applications are currently limited by unacceptable reliability due primarily to failures of individual field emitters. The failure of an individual emitter produces a characteristic electrical pulse. A circuit is used to monitor and count these pulses. The technique provides a powerful tool for exploration of stable operating regimes for vacuum microelectronic devices and may be useful in other areas in which vacuum discharges must be monitored.

引用

页码：581 / 582

页数：2

共 10 条

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