DETECTION OF FAST DIFFUSING METAL IMPURITIES IN SILICON BY HAZE TEST AND BY MODULATED OPTICAL REFLECTANCE - A COMPARISON

被引：8
作者：
ALPERN, P
BERGHOLZ, W
KAKOSCHKE, R
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 12期
关键词：
D O I：
10.1149/1.2096559
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：3841 / 3848
页数：8
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