COMBINED SIMS, AES, AND XPS INVESTIGATIONS OF TANTALUM OXIDE LAYERS

被引：26
作者：
BISPINCK, H
GANSCHOW, O
WIEDMANN, L
BENNINGHOVEN, A
机构：
来源：
APPLIED PHYSICS | 1979年 / 18卷 / 02期
关键词：
D O I：
10.1007/BF00934404
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：113 / 117
页数：5
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共 31 条
[1]   DEVELOPMENTS IN SECONDARY ION MASS-SPECTROSCOPY AND APPLICATIONS TO SURFACE STUDIES [J].
BENNINGHOVEN, A .
SURFACE SCIENCE, 1975, 53 (DEC) :596-625
[2]   QUASI-SIMULTANEOUS SIMS-AES-XPS INVESTIGATION OF OXIDATION OF TI IN MONOLAYER RANGE [J].
BENNINGHOVEN, A ;
BISPINCK, H ;
GANSCHOW, O ;
WIEDMANN, L .
APPLIED PHYSICS LETTERS, 1977, 31 (05) :341-343
[3]   APPLICATION OF ELECTRON-SPECTROSCOPY TO SURFACE STUDIES [J].
BRUNDLE, CR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :212-224
[4]   INTERPRETATION OF X-RAY PHOTOEMISSION SPECTRA OF COBALT OXIDES AND COBALT OXIDE SURFACES [J].
CHUANG, TJ ;
BRUNDLE, CR ;
RICE, DW .
SURFACE SCIENCE, 1976, 59 (02) :413-429
[5]  
CHUANG TJ, 1977, SURFACE SCI, V66, P581
[6]  
Czanderna A. W., 1975, METHODS SURFACE ANAL, P103
[7]  
DAVIS LE, 1976, HDB AUGER ELECTRON S
[8]   A high efficiency ion source [J].
Finkelstein, AT .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1940, 11 (03) :94-97
[9]   INFLUENCE OF REACTIVE GASES ON SPUTTERING AND SECONDARY ION EMISSION - OXIDATION OF TITANIUM AND VANADIUM DURING ENERGETIC PARTICLE IRRADIATION [J].
HOFER, WO ;
MARTIN, PJ .
APPLIED PHYSICS, 1978, 16 (03) :271-278
[10]   ESCA STUDIES ON CHANGES IN SURFACE COMPOSITION UNDER ION-BOMBARDMENT [J].
HOLM, R ;
STORP, S .
APPLIED PHYSICS, 1977, 12 (01) :101-112
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