Design and Fabrication of Temperature Sensor for Weather Monitoring System using Micro Electro Mechanical System Technology

被引：5

作者：

Veeramani, P. ^{[1
]}

Juliet, Vimala A. ^{[1
]}

Jebakumar, Sam J. ^{[1
]}

Jagadish, R. ^{[2
]}

机构：

[1] SRM Inst Sci & Technol, Dept Elect & Instrumentat Engn, Kattankulathur, Kanchipuram, India

[2] SRM Inst Sci & Technol, Res Inst, Kattankulathur, Kanchipuram, India

来源：

ORIENTAL JOURNAL OF CHEMISTRY | 2018年 / 34卷 / 05期

关键词：

Temperature sensor; Micro Electro Mechanical System; Radiosonde;

D O I：

10.13005/ojc/340537

中图分类号：

Q5 [生物化学]; Q7 [分子生物学];

学科分类号：

071010 ; 081704 ;

摘要：

In this paper, Micro Electro Mechanical System (MEMS) based temperature sensor is designed and fabricated for weather monitoring system at troposphere level. In this design we have used meander shape, because it is easy to vary the length. We have optimized the length in this design. Due to certain advantages like low cost, easily available, high melting and boiling point, molybdenum material is used for fabrication of this design. The four meander type temperature sensors are designed with various dimensions of sizes in 6.7mmx4mm, 9.5mmx4mm, 5.2mmx4mm, 6.5mmx4mm. The Temperature Coefficient of Resistance (TCR) values for four various sensors mentioned above are 3.4 x 10(-)(4) C-1, 3.7 x 10(-4) C-1, 7.0 x 10(-4) C-1 7.5 x 10(-4) C-1. For radiosonde applications the sensor must have high sensitivity, high degree of accuracy, good linearity and with better TCR values. The experimental results are better for dimension 6.7mm x4mm for all characteristics mentioned above. The practical results are compared with the theoretical values.

引用

页码：2510 / 2516

页数：7

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