DENSITIES OF AMORPHOUS THIN-FILMS

被引：37

|

作者：

SHIOJIRI, M

SAITO, Y

OKADA, H

SASAKI, H

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1979年 / 18卷 / 10期

关键词：

D O I：

10.1143/JJAP.18.1931

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1931 / 1936

页数：6

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