DEPOSITION OF WIDE-AREA DIAMOND FILMS IN MAGNETO-MICROWAVE PLASMA

被引：9

作者：

HIRAKI, A

KAWARADA, H

MAR, KS

YOKOTA, Y

WEI, J

SUZUKI, J

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷

关键词：

D O I：

10.1016/0168-583X(89)90301-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：799 / 806

页数：8

共 21 条

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