IMPACT COLLISION ION-SCATTERING SPECTROMETRY STUDIES OF THIN METAL OVERLAYERS ON SI(111) SURFACES

被引：4
作者：
CHANG, CS
PORTER, TL
TSONG, IST
机构：
来源：
VACUUM | 1989年 / 39卷 / 11-12期
关键词：
D O I：
10.1016/0042-207X(89)91120-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：1195 / 1199
页数：5
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