GROWTH MODE DISCRIMINATION OF THIN-FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：0

作者：

MATSUSHITA, Y

YAGI, K

NARUSAWA, T

HONJO, G

机构：

[1] TOKYO INST TECHNOL,DEPT PHYS,OH OKAYAMA,MEGURO 152,TOKYO,JAPAN

[2] ULVAC CORP,2500,HAGIZONO,CHIGASAKI 253,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年

关键词：

D O I：

暂无

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：567 / 570

页数：4

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