GROWTH MODE DISCRIMINATION OF THIN-FILMS BY AUGER-ELECTRON SPECTROSCOPY

被引：0
|
作者：
MATSUSHITA, Y
YAGI, K
NARUSAWA, T
HONJO, G
机构：
[1] TOKYO INST TECHNOL,DEPT PHYS,OH OKAYAMA,MEGURO 152,TOKYO,JAPAN
[2] ULVAC CORP,2500,HAGIZONO,CHIGASAKI 253,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 1974年
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D O I：
暂无
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：567 / 570
页数：4
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