A STUDY OF THE INITIAL OXIDATION OF POLYCRYSTALLINE SI USING SURFACE-ANALYSIS TECHNIQUES

被引：18
作者：
KAZMERSKI, LL
JAMJOUM, O
IRELAND, PJ
WHITNEY, RL
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1981年 / 18卷 / 03期
关键词：
D O I：
10.1116/1.570964
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：960 / 964
页数：5
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