ABSOLUTE PHOTON YIELDS IN THE SPUTTER-INDUCED OPTICAL EMISSION PROCESS

被引：42

作者：

TSONG, IST

YUSUF, NA

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 12期

关键词：

D O I：

10.1063/1.90268

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：999 / 1002

页数：4

共 13 条

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TSONG, IST ;

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ANALYTICAL CHEMISTRY, 1977, 49 (01) :A16-&

[8] USE OF SPUTTER-INDUCED EMISSION-SPECTROSCOPY FOR ANALYSIS OF HYDROGEN IN SOLIDS [J].

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[9] EXCITATION EFFICIENCY OF ATOMS EJECTED DURING ION-BEAM SPUTTERING [J].

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[10] HYDROGEN AND FLUORINE PROFILES IN GDF3 FILMS MEASURED BY SPUTTER-INDUCED OPTICAL EMISSION [J].

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BHALLA, AS .

APPLIED PHYSICS LETTERS, 1978, 32 (06) :381-383

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